DEPOSITION OF LOW LOSS MIRRORS USING SPECTOR Jason George, Product Marketing Engineer Brian Knollenberg, Product Marketing Manager Introduction
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چکیده
1 Thin film specifications continue to push the envelope of manufacturing capabilities. Many advanced commercial and military applications require ultra low loss films that are extremely difficult to deposit using conventional Electron beam or Ion Assisted Deposition (IAD) technology. Ring Laser Gyroscope (RLG) mirrors for instance require high packing density, minimal defects, and negligible absorption. Veeco Instruments’ SPECTOR Ion Beam Deposition system has demonstrated unparalleled performance in the manufacturing of such low loss films. In this paper we introduce the SPECTOR system and present data for RLG mirrors deposited using the system.
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